• Two 300mm crucibles

• 16cm RF ion source (1000mA, 1500V)

• Two diffusion pumps or cryopumps

• Dual zone temperature control

• General control platform and user friendly interface, allow customers set all control parameters of the coating machine by themselves

• Optical Monitor  400nm~1650nm, direct transmittance OMS/ Reflection OMS with chip changer

• Support third –party optical monitor.

• JEOL e-gun,  RF assistant ion source, 6 chips crystal monitor, Cryopump

• Vacuum chamber size  800mm diameter, 1300mm high

• Film thickness Monitor：  400nm~1650nm, direct transmittance OMS/ reflection chip changer OMS 

• Application： Laser facet coating, general optical coating.