• Substrate size: 3’ ~ 6’ diameter or 4x6’ planetary jig

• Deposition source, 3 x 8’ targets with pulse DC power supplies + plasma assistant source.

• Film thickness monitor, Laser optical monitor with film uniformity automatic control

• Substrate size: 3’~6’ diameter or 4 x 6’ diameter planetary jig

• Deposition source: 4 x 8’ targets with MF power supplies

• Film thickness monitor, Laser optical monitor with film uniformity automatic control

• Substrate size: 24’ Diameter,

• Option one, 3 x 10’ targets with pulse DC power supply w/w assistant ion source

• Option two, 4x 10’ targets with MF power supply

• Film thickness monitor, Timer / optical monitor