Products_GLLITEK CORPORATION WELCOME TO INQUIER

•Film design, Coating simulation /Optical monitoring/Film thickness uniformity feedback control

• Substrate size: 3’~6’ diameter or 4 x 6’ diameter planetary jig

• Deposition source: 4 x 8’ targets with MF power supplies

• Film thickness monitor, Laser optical monitor with film uniformity automatic control

• Substrate size: 24’ Diameter,

• Option one, 3 x 10’ targets with pulse DC power supply w/w assistant ion source

• Option two, 4x 10’ targets with MF power supply

• Film thickness monitor, Timer / optical monitor

• Substrate size: 14’ Diameter

• Deposition source, I6cm RF ion source, beam current 600mA, beam voltage 1250V

• Aassistant source, plasma ion source

• Film thickness monitor, optical monitor/timer/crystal monitor

• Substrate size: 12’ Diameter

• Deposition source, I6cm RF ion source, beam current 800mA, beam voltage 1500V

• Assistant source: 12cm RF ion source, beam current 400mA, beam voltage 1500V

• Film thickness monitor: Optical monitoring with film uniformity feedback control system